Micro powder injection molded microchannel array

Micro powder injection molding is one of the most important technologies in MST and MEMS industry due to its low cost, fine accuracy. For the purpose of obtaining micro parts with microchannel array of high quality and precision, manufaction of powders were carried out on micro powder injection molding. The influence of sintering temperature on the relative density, mechanical properties and grain size were investigated. The results show that the optimal performance of micro parts with microchannel array was acquired at the sintering temperature of 1500°C. Micro channels with good roundness and no obvious defects were successfully manufactured. The linear shrinkage of microchannels was nearly uniform with low dimension deviation. The size error can be controlled at 1.5% or less.