DocumentCode
3783933
Title
Non-equilibrium plasmas in telecommunication related technologies
Author
Z.L. Petrovic;Z.M. Raspopovic;T. Makabe
Author_Institution
Inst. of Phys., Belgrade Univ., Yugoslavia
Volume
2
fYear
2001
fDate
6/23/1905 12:00:00 AM
Firstpage
371
Abstract
We give a review of some of the advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to RF and microwave fields, the multipacting discharges and the RF discharges used for integrated circuit processing.
Keywords
"Gases","Physics","Electrons","Plasma materials processing","Atmosphere","Plasma chemistry","Fault location","Production","Electric breakdown","Radiofrequency integrated circuits"
Publisher
ieee
Conference_Titel
Telecommunications in Modern Satellite, Cable and Broadcasting Service, 2001. TELSIKS 2001. 5th International Conference on
Print_ISBN
0-7803-7228-X
Type
conf
DOI
10.1109/TELSKS.2001.955801
Filename
955801
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