• DocumentCode
    3783933
  • Title

    Non-equilibrium plasmas in telecommunication related technologies

  • Author

    Z.L. Petrovic;Z.M. Raspopovic;T. Makabe

  • Author_Institution
    Inst. of Phys., Belgrade Univ., Yugoslavia
  • Volume
    2
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    371
  • Abstract
    We give a review of some of the advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to RF and microwave fields, the multipacting discharges and the RF discharges used for integrated circuit processing.
  • Keywords
    "Gases","Physics","Electrons","Plasma materials processing","Atmosphere","Plasma chemistry","Fault location","Production","Electric breakdown","Radiofrequency integrated circuits"
  • Publisher
    ieee
  • Conference_Titel
    Telecommunications in Modern Satellite, Cable and Broadcasting Service, 2001. TELSIKS 2001. 5th International Conference on
  • Print_ISBN
    0-7803-7228-X
  • Type

    conf

  • DOI
    10.1109/TELSKS.2001.955801
  • Filename
    955801