• DocumentCode
    3785331
  • Title

    Numerical Conformal Mapping for Treatment of Geometry Problems in Process Simulation

  • Author

    A. Seidl;M. Svoboda

  • Author_Institution
    Institute fur Festkorpertechnologie, Munich, Germany
  • Volume
    4
  • Issue
    4
  • fYear
    1985
  • Firstpage
    404
  • Lastpage
    407
  • Abstract
    In semiconductor modeling, partial differential equations often have to be solved on a domain with a curved boundary. A numerical conformal mapping well suited for process modeling problems is presented. Its use in connection with a moving boundary is explained.
  • Keywords
    "Conformal mapping","Geometry","Solid modeling","Partial differential equations","Boundary conditions","Mesh generation","Switches","Finite element methods","Shape","Closed-form solution"
  • Journal_Title
    IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/TCAD.1985.1270138
  • Filename
    1270138
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3785331