• DocumentCode
    3785339
  • Title

    Foreword

  • Author

    S. Goto;S. Asai

  • Author_Institution
    Application System Research Laboratory, C &
  • Volume
    6
  • Issue
    3
  • fYear
    1987
  • Keywords
    "Design automation","Very large scale integration","Logic devices","Computational modeling","Research and development","Physics","Compaction","Circuit faults","Particle beam optics","Resists"
  • Journal_Title
    IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/TCAD.1987.1270274
  • Filename
    1270274