DocumentCode
3785339
Title
Foreword
Author
S. Goto;S. Asai
Author_Institution
Application System Research Laboratory, C &
Volume
6
Issue
3
fYear
1987
Keywords
"Design automation","Very large scale integration","Logic devices","Computational modeling","Research and development","Physics","Compaction","Circuit faults","Particle beam optics","Resists"
Journal_Title
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Publisher
ieee
ISSN
0278-0070
Type
jour
DOI
10.1109/TCAD.1987.1270274
Filename
1270274
Link To Document