High temperature stable high electromechanical coupling substrates and application for surface acoustic wave devices

Author

Yamanouchi, Kazuhiko ; ISHII, Toru

Author_Institution

Tohoku Inst. of Technol., Sendai, Japan

Volume

1

fYear

2001

fDate

2001

Firstpage

189

Abstract

In this paper, in order to improve the TCF the propagation characteristics of SiO₂/Rotated Y-cut, X-propagating LiNbO ₃ leaky SAW substrates with a large electromechanical coupling coefficient (k²) and zero temperature coefficient of frequency (TCF) are theoretically investigated. The results showed a large k² of leaky SAW over 0.2 (zero k² of Rayleigh mode), zero TCF and zero propagation attenuation in the case of short boundary at thin film thickness of H/λ≑0.15-0.25(H: SiO₂ film thickness, λ:SAW wavelength) were obtained. The experimental results agreed to the theoretical ones

Keywords

lithium compounds; piezoelectric materials; silicon compounds; substrates; surface acoustic wave devices; LiNbO₃ substrate; Rayleigh mode; SiO₂ thin film; SiO₂-LiNbO₃; electromechanical coupling coefficient; leaky SAW mode; propagation attenuation; surface acoustic wave device; temperature coefficient of frequency; temperature stability; Acoustic propagation; Acoustic waves; Attenuation; Frequency; Laplace equations; Substrates; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991606

Filename

991606