Actuation of atomic force microscope cantilevers by acoustic radiation pressure

Author

Onaran, A. Guclu ; Degertekin, F. Lvent ; Hadimioglu, Babur ; Sulchek, Todd ; Quate, C.F.

Author_Institution

Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

Volume

1

fYear

2001

fDate

2001

Firstpage

509

Abstract

This paper reports an actuation method for atomic force microscope (AFM) cantilevers in liquids utilizing acoustic radiation pressure (ARP) generated by a focused acoustic transducer. This new method allows the application of a localized force of controlled amplitude at a desired location on a cantilever over a wide bandwidth (10 MHz). The localized nature of the applied forces allows the characterization of flexural and torsional oscillation modes of the AFM cantilevers. It is also demonstrated that the ARP actuator can be used for tapping mode atomic force microscope imaging

Keywords

acoustic applications; acoustic streaming; actuators; atomic force microscopy; radiation pressure; 10 MHz; acoustic radiation pressure; actuation method; atomic force microscope cantilevers; controlled amplitude; flexural modes; focused acoustic transducer; localized force; tapping mode atomic force microscope imaging; torsional oscillation modes; Acoustic transducers; Acoustic waves; Actuators; Atomic force microscopy; Atomic measurements; Bandwidth; Focusing; Force control; Force measurement; Frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991674

Filename

991674