• DocumentCode
    3786367
  • Title

    Guest Editorial Special Section on the International Symposium on Semiconductor Manufacturing

  • Author

    B. Sohn

  • Volume
    17
  • Issue
    3
  • fYear
    2004
  • Firstpage
    247
  • Lastpage
    247
  • Keywords
    "Semiconductor device manufacture","Production facilities","Electronics industry","Lithography","Moore´s Law","Dielectrics","MOSFETs","Paper technology","Materials science and technology","Rhythm"
  • Journal_Title
    IEEE Transactions on Semiconductor Manufacturing
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2004.832970
  • Filename
    1321117
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3786367