A 35 MHz linear array for medical imaging

This paper discusses the design, fabrication and testing of a 35 MHz linear ultrasonic array. The array features monolithic piezoelectric elements diced out of TRS 600FGHD fine grain high-density ceramic. A lossy urethane doped with gas filled microspheres is used as a kerf-filler to dampen inter-element acoustic propagation and reduce pulse length. The array incorporates a slotted single matching layer made from an unloaded epoxy. This matching layer also contributes to the reduction of pulse length and an increase in sensitivity. Array elements are spaced by a 50 μm pitch and interconnected via a flexible circuit. An 85 Ω transmission line coaxial cable is used to electrically match the array elements to the 50 Ω system electronics. The final 64-element array design is based on experimental results obtained from several four-element prototype arrays. An average center frequency of 34 MHz with a -6 dB bandwidth of at least 45% per element is achieved with the final prototype array