DocumentCode :
3790163
Title :
Comments on "Two-dimensional numerical analysis of impurity atom diffusion in semiconductors"
Author :
P.C. Murley;R.R. O´Brien
Author_Institution :
IBM Corporation, Hopewell Junction, NY
Volume :
31
Issue :
7
fYear :
1984
Firstpage :
1005
Lastpage :
1005
Journal_Title :
IEEE Transactions on Electron Devices
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1984.21650
Filename :
1483935
Link To Document :
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