3796161

Guest Editorial - Special Section on the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics

19

4

2006

370

371

"Metrology","Nanoelectronics","CMOS technology","Semiconductor device manufacture","Semiconductor materials","Silicon","Transmission electron microscopy","Face detection","Spectroscopy","X-ray imaging"

IEEE Transactions on Semiconductor Manufacturing

ieee

0894-6507

jour

10.1109/TSM.2006.884597

4012091