DocumentCode :
3804998
Title :
Special Issue on the Physics of RF Discharges for Plasma Processing
Volume :
14
Issue :
2
fYear :
1986
Firstpage :
77
Lastpage :
77
Journal_Title :
IEEE Transactions on Plasma Science
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.1986.4316509
Filename :
4316509
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3804998
