Title :
Object-oriented hybrid PN model of semiconductor manufacturing line
Author :
Wang, Zhongjie ; Wu, Qidi
Author_Institution :
CIMS Res. Center, Tongji Univ., Shanghai, China
Abstract :
Modeling of semiconductor manufacturing lines has always been a difficult issue. By employing the graphical description and mathematical expression of Petri nets, the paper defines the concept of work center and establishes the object-oriented PN model (OPN). Furthermore, the continuous and discrete transitions are combined to reduce the dimension of the model, finally the object-oriented hybrid PN model is established. This model provides a good foundation for studying scheduling policies.
Keywords :
Petri nets; integrated circuit manufacture; object-oriented methods; production control; continuous transitions; discrete transitions; object-oriented hybrid Petri net model; scheduling policies; semiconductor manufacturing line; Costs; Fabrication; Integrated circuit manufacture; Job shop scheduling; Manufacturing processes; Object oriented modeling; Processor scheduling; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Intelligent Control and Automation, 2002. Proceedings of the 4th World Congress on
Print_ISBN :
0-7803-7268-9
DOI :
10.1109/WCICA.2002.1020802
