• DocumentCode
    381748
  • Title

    New materials and technologies for micromachined metal oxide gas sensor arrays

  • Author

    Wöllenstein, J. ; Böttner, H. ; Plaza, J.A. ; Cané, C.

  • Author_Institution
    Fraunhofer Inst. Phys. Meas. Techniques, Freiburg, Germany
  • Volume
    1
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    404
  • Abstract
    We present a new silicon micromachined low power heater platform comprising sensor arrays which feature a number of different gas sensitive metal oxides. The sensing elements of the arrays are composed of alternatively n-type SnO2, n-type WO3, n-type ZnO, p-type Cr1.8Ti0.2O3+z or n-type V2O5. Characterisation of the arrays under trace gas exposure is presented.
  • Keywords
    arrays; electric heating; elemental semiconductors; gas sensors; micromachining; microsensors; silicon; CrTiO; Si; Si micromachined heater platform; V2O5; WO3; ZnO; gas sensitive metal oxides; low power heater platform; metal oxide gas sensor arrays; microhotplate; micromachined metal oxide gas sensor arrays; n-type; Energy consumption; Gas detectors; Glass; Inorganic materials; Sensor arrays; Silicon; Temperature distribution; Temperature sensors; Thermal sensors; Thick film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037125
  • Filename
    1037125
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=381748