Title :
Plasma sprayed thick film anisotropic magnetoresistive (AMR) sensors
Author :
Gambino, Richard J. ; Raja, Manivel M. ; Sampath, Sanjay ; Greenlaw, Robert
Author_Institution :
Dept. of Mater. Sci. & Eng., State Univ. of New York, Stony Brook, NY, USA
Abstract :
Reports recent work on thick film permalloy (NiFe) and NiCo alloy anisotropic magnetoresistive sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo alloy sensors. Resistivity of thermal sprayed thick film is 40-60 μΩ-cm, which is higher than bulk material. A maximum ΔR/R value of 5.2% is achieved after thermal annealing. A high ΔR/R value and low saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.
Keywords :
Permalloy; annealing; cobalt alloys; magnetic anisotropy; magnetic sensors; magnetoresistive devices; nickel alloys; plasma arc spraying; 40 to 60 muohmcm; NiCo; NiFe; anisotropic magnetoresistive sensors; plasma sprayed thick films; saturation fields; sensor layouts; thermal annealing; Anisotropic magnetoresistance; Conductivity; Magnetic materials; Magnetic sensors; Sensor phenomena and characterization; Thermal resistance; Thermal sensors; Thermal spraying; Thick film sensors; Thick films;
Conference_Titel :
Sensors, 2002. Proceedings of IEEE
Print_ISBN :
0-7803-7454-1
DOI :
10.1109/ICSENS.2002.1037179
