DocumentCode

3824601

Title

Submicron UV photo-etching

Volume

27

Issue

2

fYear

1981

fDate

2/1/1981 12:00:00 AM

Firstpage

122

Journal_Title

Electronics and Power

Publisher

iet

ISSN

0013-5127

Type

jour

DOI

10.1049/ep.1981.0048

Filename

5185599