Real-time response and system integration in a back-end semiconductor manufacturing system

Real-time response is fundamental to a manufacturing execution system used in a back-end semiconductor manufacturing system (BSMS) on the shop floor. This paper presents a practical solution to easing system integration while improving its real-time responses. First, by incorporating the concept of virtual production lines (VPL) into the manufacturing execution system modeling, the model complexity can be reduced significantly, consequently easing its integration to shop floor controls. Secondly, a new system integration framework is introduced, which guarantees the real-time entries of system data for all the activities occurring on the shop floor. Real-time information helps management make optimal decisions, thus improving the productivity of a BSMS.