• DocumentCode
    3848433
  • Title

    Fluid Model of Plasma Sheath Involving Ion Energy Spectrum

  • Author

    Josef Blazek;Petr Bartos;Petr Spatenka

  • Author_Institution
    Pedagogical Faculty, University of South Bohemia, Č
  • Volume
    38
  • Issue
    9
  • fYear
    2010
  • Firstpage
    2322
  • Lastpage
    2327
  • Abstract
    A common fluid model of ion drift in a strong electric field, appearing, e.g., in the sheath, describes ions by the Newtonian equation of motion, with ion-neutral collisions involved by an effective friction force. Such an approach implicitly anticipates a monoenergetic ion beam. We demonstrate that, due to nonlinear effects, the concept based on “average” ions is too simplified. In the suggested model, the conventional equation of ion motion is replaced by a formula considering the energy spectrum of ion flux. The formula is based on the 1-D description of charge-exchange collisions of ions with neutrals. The Newtonian equation of motion is then interpreted from the suggested collision model. It is shown that the ion fluid velocity should be identified with the rms velocity in the ion beam and that the effective ion mean free path appearing in the friction term should be chosen as a double of the ion mean free path for the charge-exchange collisions.
  • Keywords
    "Plasma sheaths","Radio frequency","Electrodes","Electrons","Plasma properties","Nonlinear equations","Plasma density","Friction","Ion beams","Poisson equations"
  • Journal_Title
    IEEE Transactions on Plasma Science
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2010.2055894
  • Filename
    5545408