Optomechanical simulation of a micromachined interferometric pressure sensor

Author

Kusko, Mihai ; Nedelcu, Oana Tatiana ; Muller, Raluca

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania

Volume

1

fYear

2002

fDate

2002

Firstpage

75

Abstract

In this paper, we present the results obtained from the optomechanical simulation of a Fabry-Perot pressure sensor. Each mirror of the structure is considered to be composed of a layer of polysilicon and a layer of nitride acting as an antireflective coating for 1.3 μm wavelength.

Keywords

Fabry-Perot interferometers; Fabry-Perot resonators; antireflection coatings; mechanical engineering computing; micromachining; micromirrors; optical engineering computing; optical fibres; photoreflectance; pressure sensors; refractive index; 1.3 micron; Fabry-Perot pressure sensors; Fabry-Perot resonators; Si₃N₄-Si; micromachined interferometric pressure sensors; optical fibers; optomechanical simulation; polysilicon/nitride mirrors; reflectivity; refractive index; wavelength dependent antireflective coating; Coatings; Fabry-Perot; Mirrors; Optical fibers; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Reflectivity; Refractive index;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2002. CAS 2002 Proceedings. International

Print_ISBN

0-7803-7440-1

Type

conf

DOI

10.1109/SMICND.2002.1105805

Filename

1105805