DocumentCode
385580
Title
PolyDiMethylSiloxane nanostructures fabrication by FIB machining for single molecular studies applications
Author
Leclerc, Eric ; Mita, Yoshio ; Fujii, Tenuo
Author_Institution
Inst. of Ind. Sci., Univ. of Tokyo, Japan
Volume
2
fYear
2002
fDate
2002
Firstpage
1634
Abstract
Nanotower structures were fabricated in PDMS (PolyDiMethylSiloxane) as a platform for molecular patterning. By FIB machining, the work shows the possibility of this material to reach nanometer scales.
Keywords
biological techniques; focused ion beam technology; micromachining; molecular biophysics; nanotechnology; 0.25 micron; 0.5 micron; FIB machining; PolyDiMethylSiloxane nanostructures fabrication; focused ion beam machine; lab-on-chip; molecular patterning; nanotowers; single molecular studies; single molecule immobilizations; Etching; Fabrication; Ion beams; Machining; Nanobioscience; Nanoscale devices; Nanostructures; Poles and towers; Proteins; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference, 2002. Proceedings of the Second Joint
ISSN
1094-687X
Print_ISBN
0-7803-7612-9
Type
conf
DOI
10.1109/IEMBS.2002.1106575
Filename
1106575
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