Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers

We are developing a multi-anode sawtooth silicon drift detector (MSSDD) with an anode pitch of 250 /spl mu/m for one-dimensional position-sensitive detection of low-energy X-rays down to /spl sim/200 eV. The detector is intended to be used in X-ray diffraction analysis. In this paper, we present new results of X-ray spectroscopy measurements with detectors fabricated on neutron transmutation doped (NTD) wafers with a thickness of 290 /spl mu/m. Using an MSSDD with an anode pitch of 250 /spl mu/m and having p/sup +/ strips on both sides, we have measured an energy resolution of 191-eV full-width half-maximum (FWHM) per anode pixel for the 5.89 keV line of /sup 55/Fe at 213 K. At room temperature the energy resolution is 375 eV FWHM. Split events are almost completely eliminated due to the sawtooth-shaped p/sup +/ strips.