Title :
Low loss silicon waveguides for the terahertz spectral region
Author :
B. Kuyken;A. Pagies;M. Vanwolleghem;D. Yarekha;J.-F. Lampin;G. Roelkens
Author_Institution :
Photonics Research Group, Department of Information Technology, Ghent University-imec, Ghent, Belgium
Abstract :
Chip scale terahertz dielectric waveguides, consisting out of high resistivity silicon as a core material have been fabricated. The waveguide loss is measured to be ~1dB/cm at both 1 THz and 2.5 THz.
Keywords :
"Optical waveguides","Silicon","Loss measurement","Conductivity","Semiconductor device measurement","Fabrication","Optical losses"
Conference_Titel :
Infrared, Millimeter, and Terahertz waves (IRMMW-THz), 2015 40th International Conference on
Electronic_ISBN :
2162-2035
DOI :
10.1109/IRMMW-THz.2015.7327676
