• DocumentCode
    39029
  • Title

    Interfacial Mechanical Properties of n -Alkylsilane Monolayers on Silicon Substrates

  • Author

    Bush, B.G. ; Del Rio, F.W. ; Jaye, C. ; Fischer, D.A. ; Cook, R.F.

  • Author_Institution
    Mater. Meas. Lab., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • Volume
    22
  • Issue
    1
  • fYear
    2013
  • fDate
    Feb. 2013
  • Firstpage
    34
  • Lastpage
    43
  • Abstract
    The interfacial properties of n-alkylsilane monolayers on silicon were investigated by normal force spectroscopy, lateral force measurements, and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. Monolayers of (CH3( CH2)n - 1SiCl3) with chain lengths n = 5, 8, 12, and 18 were prepared and NEXAFS spectra were used to compute the dichroic ratio, RI. As n decreased from 18 to 5, the film structures change from ordered (RI = 0.41) to disordered (RI = 0.12) states. Normal force spectroscopy data were analyzed with a modified elastic adhesive contact model to extract Young´s modulus, Efilm, and the work of adhesion, w, of the film; Efilm decreased from 1.2 to 0.67 GPa, and w increased from 48.6 to 60.1 mJ·m-2 as n decreased from 18 to 5. Lateral force measurements quantified the reduction in friction via an interfacial shear strength, τ , and a lateral deformation analog, η. Monolayer adsorption reduced τ from 3500 MPa for SiO2 to less than 50 MPa for n = 12 and 18 alkylsilanes and was dependent on contact pressure. Conversely, η was pressure invariant, with values of ≈3500 MPa for n = 5 and 8 and ≈1000 MPa for n = 12 and 18.
  • Keywords
    XANES; Young´s modulus; force measurement; micromechanical devices; silicon compounds; MEMS; NEXAFS spectra; SiO2; Young modulus; film structures; interfacial mechanical properties; interfacial shear strength; lateral deformation analog; lateral force measurements; microelectromechanical systems; modified elastic adhesive contact model; monolayer adsorption; n-alkylsilane monolayers; near-edge X-ray absorption fine structure spectroscopy; normal force spectroscopy data; pressure invariant; silicon substrates; Adhesives; Force; Friction; Micromechanical devices; Silicon; Spectroscopy; Substrates; Friction; interface phenomena; microelectromechanical devices; reliability; silicon; surface treatment;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2012.2213798
  • Filename
    6295634