DocumentCode :
39029
Title :
Interfacial Mechanical Properties of n -Alkylsilane Monolayers on Silicon Substrates
Author :
Bush, B.G. ; Del Rio, F.W. ; Jaye, C. ; Fischer, D.A. ; Cook, R.F.
Author_Institution :
Mater. Meas. Lab., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Volume :
22
Issue :
1
fYear :
2013
fDate :
Feb. 2013
Firstpage :
34
Lastpage :
43
Abstract :
The interfacial properties of n-alkylsilane monolayers on silicon were investigated by normal force spectroscopy, lateral force measurements, and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy. Monolayers of (CH3( CH2)n - 1SiCl3) with chain lengths n = 5, 8, 12, and 18 were prepared and NEXAFS spectra were used to compute the dichroic ratio, RI. As n decreased from 18 to 5, the film structures change from ordered (RI = 0.41) to disordered (RI = 0.12) states. Normal force spectroscopy data were analyzed with a modified elastic adhesive contact model to extract Young´s modulus, Efilm, and the work of adhesion, w, of the film; Efilm decreased from 1.2 to 0.67 GPa, and w increased from 48.6 to 60.1 mJ·m-2 as n decreased from 18 to 5. Lateral force measurements quantified the reduction in friction via an interfacial shear strength, τ , and a lateral deformation analog, η. Monolayer adsorption reduced τ from 3500 MPa for SiO2 to less than 50 MPa for n = 12 and 18 alkylsilanes and was dependent on contact pressure. Conversely, η was pressure invariant, with values of ≈3500 MPa for n = 5 and 8 and ≈1000 MPa for n = 12 and 18.
Keywords :
XANES; Young´s modulus; force measurement; micromechanical devices; silicon compounds; MEMS; NEXAFS spectra; SiO2; Young modulus; film structures; interfacial mechanical properties; interfacial shear strength; lateral deformation analog; lateral force measurements; microelectromechanical systems; modified elastic adhesive contact model; monolayer adsorption; n-alkylsilane monolayers; near-edge X-ray absorption fine structure spectroscopy; normal force spectroscopy data; pressure invariant; silicon substrates; Adhesives; Force; Friction; Micromechanical devices; Silicon; Spectroscopy; Substrates; Friction; interface phenomena; microelectromechanical devices; reliability; silicon; surface treatment;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2012.2213798
Filename :
6295634
Link To Document :
بازگشت