DocumentCode
393183
Title
Temperature stability of surface acoustic wave resonators on the in-plane rotated 33°Y-cut quartz
Author
Kanna, Shigeo ; Iizawa, Keigo ; Yamazaki, Takashi ; Takagi, Michiaki
Author_Institution
Seiko Epson Corp., Nagano, Japan
Volume
1
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
101
Abstract
We present surface acoustic wave resonators on the in-plane rotated 33°Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.
Keywords
quartz; surface acoustic wave resonators; thermal stability; Euler angle; Rayleigh waves; finite element method; frequency temperature characteristics; in-plane rotated 33°Y-cut quartz; surface acoustic wave resonators; temperature stability; Accuracy; Acoustic measurements; Acoustic waves; Finite element methods; Frequency; Prototypes; Resonance; Stability; Surface acoustic waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1193362
Filename
1193362
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