Title :
Non-scanning means for determining vibrational distribution in BAW and SAW devices
Author :
Watanabe, Yasuaki ; Sato, Takayuki ; Goka, Shigeyoshi ; Sekimoto, Hitoshi
Author_Institution :
Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
A non-mechanical scanning method for visualizing the mode shapes of piezoelectric devices is described. Laser speckle interference, a periodic resonator excitation, charge coupled device (CCD) image capture, and image processing using two-dimensional correlation filtering are effectively combined in this method. Even with small data averaging and a short measurement time, this method produces very clear, high-contrast mode shape images. The experimental results for several spurious modes in AT-cut quartz resonators and surface acoustic wave (SAW) devices demonstrate the applicability of the proposed method.
Keywords :
bulk acoustic wave devices; crystal resonators; image processing; measurement by laser beam; optical correlation; speckle; surface acoustic wave resonators; vibration measurement; AT-cut quartz resonators; AW devices; SAW devices; SiO2; charge coupled device image; high-contrast mode shape images; image capture; image processing; laser speckle interference; mode shapes; nonmechanical scanning method; periodic resonator excitation; piezoelectric devices; small data averaging; spurious modes; surface acoustic wave devices; two-dimensional correlation filtering; vibrational distribution; Charge coupled devices; Charge-coupled image sensors; Data visualization; Interference; Laser excitation; Laser modes; Piezoelectric devices; Shape measurement; Speckle; Surface acoustic wave devices;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1193553
