Title :
Precision alignment of pulse stage using moire signals
Author :
Liu, Jing-Nan ; Zhou, Lizhong ; Uchida, Hideo ; Kono, A. ; Sharma, Rina ; Chitnis, Vijay T. ; Furuhashi, Hideo ; Uchida, Yoshiyuki
Author_Institution :
Southeast Univ., Nanjing, China
Abstract :
A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition from ±0.25mm to ±12μm with precision accuracy of ±4nm.
Keywords :
diffraction gratings; digital simulation; laser beam applications; moire fringes; position control; moire signals; optical intelligent alignment system; permeation type diffraction grating; position sensor; precision accuracy; precision alignment; Computational modeling; Computer simulation; Diffraction gratings; Intelligent sensors; Intelligent systems; Laboratories; Optical control; Optical sensors; Plasma measurements; Sensor systems;
Conference_Titel :
SICE 2002. Proceedings of the 41st SICE Annual Conference
Print_ISBN :
0-7803-7631-5
DOI :
10.1109/SICE.2002.1195427
