Electrostatical coupling-spring for micro-mechanical filtering applications

Author

Galayko, Dimitri ; Kaiser, Andreas ; Buchaillot, Lionel ; Collard, Dominique ; Combi, Chantal

Author_Institution

IEMN-ISEN, France

Volume

3

fYear

2003

fDate

25-28 May 2003

Abstract

This paper presents a novel method of implementing coupled resonator micro-mechanical (MEMS) filters without mechanical springs. The method proposes to use an electrostatical spring, formed by two or more electrostatical transducers, to couple single resonators. This spring has a stiffness controlled by bias voltages, thus variable-bandwidth filters can be obtained. An original biasing scheme is used to avoid external connections on sensitive signal nodes. Theoretical analysis as well as experimental results on 4-th order bandpass filters at 2.5 MHz are presented.

Keywords

Q-factor; band-pass filters; electrostatic devices; micromechanical resonators; passive filters; radiofrequency filters; resonator filters; 2.5 MHz; bias voltage controlled spring stiffness; biasing scheme; coupled resonator MEMS filters; electrostatical coupling-spring; electrostatical transducers; fourth-order bandpass filters; micro-mechanical filtering applications; variable-bandwidth filters; Band pass filters; Bandwidth; Capacitance; Filtering; Frequency; Microelectronics; Resonator filters; Springs; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on

Print_ISBN

0-7803-7761-3

Type

conf

DOI

10.1109/ISCAS.2003.1205073

Filename

1205073