Application of electromagnetic actuator using rubber film to three-degrees-of-freedom precision stage

In this study, a precision stage constructed of electromagnetic actuators using a rubber film has been developed. We have proposed an actuator, which consists of the rubber and an electromagnet as the actuator for the precision drive. This actuator (RE actuator, for short) has the following features: first, viscous damping is essentially obtained by the rubber. Second, the actuator functions also as a flexible joint. Third, since there is no sliding guide, precise positioning can be performed. As an application of the RE actuator, the XYZ precision stage has been developed. The feature of this stage is that it can be driven in the XYZ direction in spite of the monolithic structure. It is also one of the features that residual vibration does not occur after positioning. Fundamental properties of the stage are investigated, and experiments show the 20 nanometer positioning.