Title :
Application of electromagnetic actuator using rubber film to three-degrees-of-freedom precision stage
Author :
Nomura, Kensaku ; Noritsugu, Toshiro ; Arai, Junji
Author_Institution :
Graduate Sch. of Natural Sci. & Technol., Okayama Univ., Japan
Abstract :
In this study, a precision stage constructed of electromagnetic actuators using a rubber film has been developed. We have proposed an actuator, which consists of the rubber and an electromagnet as the actuator for the precision drive. This actuator (RE actuator, for short) has the following features: first, viscous damping is essentially obtained by the rubber. Second, the actuator functions also as a flexible joint. Third, since there is no sliding guide, precise positioning can be performed. As an application of the RE actuator, the XYZ precision stage has been developed. The feature of this stage is that it can be driven in the XYZ direction in spite of the monolithic structure. It is also one of the features that residual vibration does not occur after positioning. Fundamental properties of the stage are investigated, and experiments show the 20 nanometer positioning.
Keywords :
damping; electromagnetic actuators; mechatronics; position control; vibration control; electromagnetic actuator; microvibration control; monolithic structure; positioning; precision drive; residual vibration; rubber film; three-degrees-of-freedom precision stage; vibration isolation; viscous damping; Coils; Control engineering; Damping; Electromagnets; Magnetic films; Piezoelectric actuators; Piezoelectric films; Rubber; Scanning probe microscopy; Systems engineering and theory;
Conference_Titel :
Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
Print_ISBN :
0-7803-7759-1
DOI :
10.1109/AIM.2003.1225079