• DocumentCode
    396962
  • Title

    Architecture of a three-probe MEMS nanomanipulator with nanoscale end-effectors

  • Author

    Wang, Xuefeng ; Vincent, Loren ; Yu, Minfeng ; Huang, Yonggang ; Liu, Chang

  • Author_Institution
    Illinois Univ., Urbana, IL, USA
  • Volume
    2
  • fYear
    2003
  • fDate
    20-24 July 2003
  • Firstpage
    891
  • Abstract
    We report the development of a three-probe manipulator for handling and characterizing the properties of nanoscopic objects. The manipulator is realized using micromachining and nanofabrication techniques. It is powered using thermal bimetallic actuation principle. We developed nanoscale end-effectors to directly interface with nanoscopic objects. The end-effectors are mode using focused ion beam milling.
  • Keywords
    end effectors; focused ion beam technology; micromachining; micromanipulators; micromechanical devices; nanotechnology; sputter etching; ion beam milling; micromachining; nanofabrication techniques; nanoscale end effectors; nanoscopic objects; thermal bimetallic actuation principle; three probe MEMS nanomanipulator; Carbon nanotubes; Ion beams; Micromechanical devices; Milling; Nanobioscience; Nanomaterials; Nanostructured materials; Nanowires; Probes; Semiconductor nanostructures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Intelligent Mechatronics, 2003. AIM 2003. Proceedings. 2003 IEEE/ASME International Conference on
  • Print_ISBN
    0-7803-7759-1
  • Type

    conf

  • DOI
    10.1109/AIM.2003.1225460
  • Filename
    1225460
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=396962