A novel torsional microactuator using bulk PZT

A torsional microactuator was developed using standard bulk lead zirconium titanate placed upon a small rectangular prism made from phosphor bronze, with a tapered conical end serving as a horn and a carefully machined interior to improve the actuator´s response. The results of testing indicate torsional motion was obtained from the device, with torsional vibration velocities of 295 mm/s at 190 kHz being obtained at 27.5 V_RMS at the output, amounting to 19,320 deg/sec vibration velocity along the outer circumference of the tip. A new method for measuring the actuator characteristics is described, and the method was used to measure the torque versus speed performance of the actuator system at 189.6 kHz, where a peak speed of 800 rpm and a peak torque of 0.27 mN-m were achieved.