DocumentCode
397450
Title
Electrical isolation of ZnO by ion irradiation
Author
Kucheyev, S.O. ; Jagadish, C. ; Williams, J.S. ; Deenapanray, P.N.K. ; Yano, Mitsuaki ; Koike, Kazuto ; Sasa, Shigehlko ; Inoue, M. ; Ogata, Ken-ichi
Author_Institution
Lawrence Livemore National Laboratory
fYear
2002
fDate
30 June-5 July 2002
Firstpage
143
Lastpage
146
Keywords
Biological materials; Chemicals; Fabrication; Implants; Isolation technology; Rapid thermal annealing; Resistors; Temperature; Thermal stability; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN
0-7803-7418-5
Type
conf
DOI
10.1109/SIM.2002.1242743
Filename
1242743
Link To Document