• DocumentCode
    399421
  • Title

    Fundamental studies of nanoscale sensing and actuation based on nanomanipulation and assembly

  • Author

    Yu, Min-Feng

  • Author_Institution
    Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA
  • Volume
    3
  • fYear
    2003
  • fDate
    27-31 Oct. 2003
  • Firstpage
    2365
  • Abstract
    An approach based on versatile nanomanipulation and assembly has been taken to investigate the fundamental properties of nanomaterials of various types for their potential applications in sensing and actuation. A nanomanipulation system with many degrees of freedom was developed for use inside a field emission scanning electron microscope. This system is capable of nanometer resolution motion, and free-space manipulation/characterization of nanostructures by the multiple probes controlled by the high precision manipulators. Specifically, the manipulation and basic construction capabilities in free space were demonstrated with nanomaterials, such as nanotubes and nanowires having diameters around tens of nanometers and length around a few microns; mechanical and electrical characterization of such individual nanoscale objects were realized with the introduction of new techniques and methods; and finally, mechanical resonance and high order parametric resonances in a nanowire mechanical system were realized using oscillating electric field induced oscillation.
  • Keywords
    field emission electron microscopy; microassembling; micromanipulators; nanotechnology; nanotubes; nanowires; robotic assembly; scanning electron microscopy; assembly; electrical characterization; field emission scanning electron microscope; free-space manipulation; high precision manipulators; mechanical characterization; mechanical resonance; multiple probes; nanomanipulation; nanomaterials; nanometer resolution motion; nanoscale actuation; nanoscale sensing; nanostructures; nanotubes; nanowires; parametric resonances; Assembly; Control systems; Electron emission; Motion control; Nanomaterials; Nanostructures; Nanowires; Probes; Resonance; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on
  • Print_ISBN
    0-7803-7860-1
  • Type

    conf

  • DOI
    10.1109/IROS.2003.1249224
  • Filename
    1249224