DocumentCode
399421
Title
Fundamental studies of nanoscale sensing and actuation based on nanomanipulation and assembly
Author
Yu, Min-Feng
Author_Institution
Dept. of Mech. & Ind. Eng., Illinois Univ., Urbana, IL, USA
Volume
3
fYear
2003
fDate
27-31 Oct. 2003
Firstpage
2365
Abstract
An approach based on versatile nanomanipulation and assembly has been taken to investigate the fundamental properties of nanomaterials of various types for their potential applications in sensing and actuation. A nanomanipulation system with many degrees of freedom was developed for use inside a field emission scanning electron microscope. This system is capable of nanometer resolution motion, and free-space manipulation/characterization of nanostructures by the multiple probes controlled by the high precision manipulators. Specifically, the manipulation and basic construction capabilities in free space were demonstrated with nanomaterials, such as nanotubes and nanowires having diameters around tens of nanometers and length around a few microns; mechanical and electrical characterization of such individual nanoscale objects were realized with the introduction of new techniques and methods; and finally, mechanical resonance and high order parametric resonances in a nanowire mechanical system were realized using oscillating electric field induced oscillation.
Keywords
field emission electron microscopy; microassembling; micromanipulators; nanotechnology; nanotubes; nanowires; robotic assembly; scanning electron microscopy; assembly; electrical characterization; field emission scanning electron microscope; free-space manipulation; high precision manipulators; mechanical characterization; mechanical resonance; multiple probes; nanomanipulation; nanomaterials; nanometer resolution motion; nanoscale actuation; nanoscale sensing; nanostructures; nanotubes; nanowires; parametric resonances; Assembly; Control systems; Electron emission; Motion control; Nanomaterials; Nanostructures; Nanowires; Probes; Resonance; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Robots and Systems, 2003. (IROS 2003). Proceedings. 2003 IEEE/RSJ International Conference on
Print_ISBN
0-7803-7860-1
Type
conf
DOI
10.1109/IROS.2003.1249224
Filename
1249224
Link To Document