DocumentCode
399790
Title
Design of MEMS-based microwave and millimeterwave switches for high power applications
Author
Ducarouge, B. ; Perret, E. ; Flourens, F. ; Aubert, H. ; Tao, J.W. ; Chauffleu, X. ; Fradin, J.P. ; Dubuc, D. ; Grenier, K. ; Pons, P. ; Plana, R.
Author_Institution
LAAS-CNRS, Univ. Paul Sabatier, Toulouse, France
Volume
1
fYear
2003
fDate
28 Sept.-2 Oct. 2003
Abstract
This paper presents the design methodology of a MEMS-based RF switches for millimeterwave applications. Both microwave, electromechanical and high power handling performances are allowed thanks to an original topology of MEMS associated to an appropriate design methodology.
Keywords
MMIC; microswitches; microwave switches; millimetre wave devices; MEMS-based microwave switches; RF switches; design methodology; high power applications; millimeterwave switches; Bridge circuits; Coplanar waveguides; Design methodology; Gold; Micromechanical devices; Microswitches; Microwave devices; Radio frequency; Switches; Topology;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN
0-7803-7821-0
Type
conf
DOI
10.1109/SMICND.2003.1251345
Filename
1251345
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