Title :
Design of MEMS-based microwave and millimeterwave switches for high power applications
Author :
Ducarouge, B. ; Perret, E. ; Flourens, F. ; Aubert, H. ; Tao, J.W. ; Chauffleu, X. ; Fradin, J.P. ; Dubuc, D. ; Grenier, K. ; Pons, P. ; Plana, R.
Author_Institution :
LAAS-CNRS, Univ. Paul Sabatier, Toulouse, France
fDate :
28 Sept.-2 Oct. 2003
Abstract :
This paper presents the design methodology of a MEMS-based RF switches for millimeterwave applications. Both microwave, electromechanical and high power handling performances are allowed thanks to an original topology of MEMS associated to an appropriate design methodology.
Keywords :
MMIC; microswitches; microwave switches; millimetre wave devices; MEMS-based microwave switches; RF switches; design methodology; high power applications; millimeterwave switches; Bridge circuits; Coplanar waveguides; Design methodology; Gold; Micromechanical devices; Microswitches; Microwave devices; Radio frequency; Switches; Topology;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251345
