Title :
Microwave and physical behavior of micro-machined structures on membrane for space applications
Author :
Kuchenbecker, J. ; Bary, L. ; Lafontan, X. ; Flourens, F. ; Takacs, A. ; Pons, P. ; Grenier, K. ; Dubuc, D. ; Aubert, H. ; Pressecq, F. ; Plana, R.
Author_Institution :
CNES, Toulouse, France
fDate :
28 Sept.-2 Oct. 2003
Abstract :
This article addresses the reliability of micro-machined structures on membrane. RF filters on membrane have been used. The aim of the present work is to prove that these micro-electro-mechanical structures (MEMS) possess an adequate behavior with respect to spatial constraints. We studied the S parameter evolution in function of the temperature and the mechanical reliability towards shocks and vibration. The structures show a very good resistance towards these preliminary constraints.
Keywords :
aerospace materials; micromechanical devices; radiofrequency filters; thermal stability; vibrations; MEMS; RF filters; S parameter evolution; mechanical reliability; membrane; micro-machined structures; shocks; space applications; spatial constraints; vibration; Biomembranes; Coplanar waveguides; Electric shock; Micromechanical devices; Microwave filters; Radio frequency; Scattering parameters; Silicon; Temperature; Vibrations;
Conference_Titel :
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN :
0-7803-7821-0
DOI :
10.1109/SMICND.2003.1251355
