DocumentCode
399809
Title
Design and fabrication of diffractive optical elements
Author
Kusko, M. ; Cojoc, D. ; Apostol, D. ; Muller, R. ; Manea, E. ; Podaru, C.
Author_Institution
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2003
fDate
28 Sept.-2 Oct. 2003
Abstract
In this paper is presented the design, fabrication and characterization of a binary phase-contrast transmission diffractive optical element made by wet etching of the glass substrate. The etch depth was controlled by profilometry measurement. The experimental result is close to the result obtained by simulations.
Keywords
diffractive optical elements; etching; optical design techniques; optical fabrication; binary phase-contrast transmission diffractive optical element; characterization; design; diffractive optical elements; etch depth; fabrication; glass substrate; profilometry measurement; wet etching; Chromium; Glass; Gold; Optical design; Optical device fabrication; Optical diffraction; Rough surfaces; Surface roughness; US Department of Energy; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2003. CAS 2003. International
Print_ISBN
0-7803-7821-0
Type
conf
DOI
10.1109/SMICND.2003.1251370
Filename
1251370
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