Title :
Laser heating of condensed noble gases: EUV source efficiency considerations
Author :
Milchberg, H.M. ; Sheng, Hua
Author_Institution :
Inst. for Phys. Sci. & Technol., Maryland Univ., College Park, MD, USA
Abstract :
This study describes experiments designed to assist in finding conditions for enhancing source efficiency in condensed Xe spray jet targets. A recent experimental scheme utilizes a pump-probe design where the laser-droplet plasma is diagnosed with an X-ray detector, a grazing incidence EUV spectrometer, and visible imaging diagnostics. The idea of the experiment is to heat the droplet with the pump pulse, producing the ion stages responsible for the EUV emission of interest. The variably delayed probe pulse further heats this droplet plasma, and the additional EUV emission contributed by that pulse is plotted versus the pump-probe delay. The inference from this measurement is the degree to which a pulse of fixed energy but variable width can sustainably produce efficient EUV emission.
Keywords :
X-ray optics; high-speed optical techniques; plasma diagnostics; plasma production by laser; ultraviolet lithography; ultraviolet sources; EUV emission; EUV lithography; EUV source efficiency; X-ray detector; condensed Xe spray jet targets; condensed noble gases; grazing incidence EUV spectrometer; laser heating; laser-droplet plasma; plasma diagnosis; pump-probe delay; pump-probe design; variably delayed probe pulse; visible imaging diagnostics; Delay; Gas lasers; Gases; Heat pumps; Heating; Plasma diagnostics; Plasma measurements; Plasma x-ray sources; Pump lasers; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1251753