DocumentCode
400345
Title
Novel integrated optical displacement sensor for scanning force microscopies
Author
Aydinli, Atilla ; Kiyat, Isa ; Kocabas, Coskun
Author_Institution
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Volume
2
fYear
2003
fDate
27-28 Oct. 2003
Firstpage
517
Abstract
A novel displacement sensor for scanning force microscopies using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.
Keywords
atomic force microscopy; infrared spectra; integrated optics; micro-optics; optical resonators; optical sensors; optical waveguides; integrated optical displacement sensor; integrated optical micro-ring resonator; scanning force microscopy; transmission spectrum; Force sensors; Integrated optics; Optical microscopy; Optical refraction; Optical resonators; Optical ring resonators; Optical sensors; Optical variables control; Optical waveguides; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7888-1
Type
conf
DOI
10.1109/LEOS.2003.1252901
Filename
1252901
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