Title :
Original MEMS-Based Single Pole Double Throw topology for millimeter wave space communications
Author :
Dubuc, David ; Rabbia, Laurent ; Grenier, Karia ; Pons, Patrick ; Vendier, Olivier ; Graffeuil, J. ; Plana, Robert
Author_Institution :
LAAS, CNRS, Toulouse, France
Abstract :
This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk micromachinings of silicon. 0.6 dB insertion loss of the SPDT circuit was measured with an isolation of 21 dB at 30 GHz.
Keywords :
capacitors; elemental semiconductors; isolation technology; micromachining; microswitches; millimetre wave devices; network topology; semiconductor thin films; silicon; 0.6 dB; 21 dB; 30 GHz; MEMS single pole double throw topology; Si; circuit design; insertion loss; micromachining; millimeter wave space communications; quarter wave line; silicon; Circuit synthesis; Circuit topology; Fabrication; Insertion loss; Micromachining; Micromechanical devices; Millimeter wave circuits; Performance evaluation; Silicon; Surface waves;
Conference_Titel :
Microwave Conference, 2003. 33rd European
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMC.2003.177645
