A very compact RF MEMS switch for frequencies up to 50 GHz

Author

Schauwecker, Bernd ; Strohm, Karl M. ; Simon, Winfried ; Mack, Torsten ; Luy, Johann-Friedrich

Author_Institution

Res. & Technol., DaimlerChrysler AG, Ulm, Germany

Volume

2

fYear

2003

fDate

7-9 Oct. 2003

Firstpage

655

Abstract

A scaled, smaller version of the recently published toggle switch, an extremely broad band and highly linear ohmic RF MEMS switch for a frequency range from DC to 50 GHz, is presented. The electromagnetic simulation, the fabrication process, and measured results of the small toggle switch are given. The switch in its smaller geometry inherits the outstanding RF performances which could even be extended with an insertion loss of 0.95 dB and an isolation of 16 dB up to 50 GHz. These measurement results are in good agreement with the simulation. Power measurements results are in good agreement with the simulation. Power measurements (2 W) in the frequency range from 8 to 18 GHz did not show a self actuation of the switch.

Keywords

electromagnetic wave propagation; microswitches; 0 to 50 GHz; 0.95 dB; 2 W; RF MEMS switch; RF performances; circuit simulation; electromagnetic simulation; insertion loss; power measurements; self actuation; switch fabrication; toggle switch; Biomembranes; Communication switching; Electromagnetic measurements; Fabrication; Insertion loss; Performance loss; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Telecommunication switching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2003. 33rd European

Print_ISBN

1-58053-834-7

Type

conf

DOI

10.1109/EUMC.2003.1262975

Filename

1262975