DocumentCode
403898
Title
Low contact-force fritting probe card using buckling microcantilevers
Author
Kataoka, Kenichi ; Ltoh, T. ; Suga, Tadatomo
Author_Institution
Research Center for Advanced Science and Technology, University of Tokyo
Volume
1
fYear
2003
fDate
Sept. 30-Oct. 2, 2003
Firstpage
1008
Lastpage
1013
Keywords
Atomic force microscopy; Atomic measurements; Current measurement; Electrical resistance measurement; Force measurement; Mechanical variables measurement; Micromechanical devices; Power measurement; Probes; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Conference, 2003. Proceedings. ITC 2003. International
ISSN
1089-3539
Print_ISBN
0-7803-8106-8
Type
conf
DOI
10.1109/TEST.2003.1271088
Filename
1271088
Link To Document