Characterization of a MEMS biochip for planar patch-clamp recording

The paper explores the transport of ions through a micropore as a precursor to the fabrication of an integrated planar patch-clamp measurement system on a microelectronic biochip. The paper presents the analytical model to estimate the series resistance and capacitance of a planar patch-clamp structure. The cross-sectional area, thickness of the membrane and the electrolyte concentrations are key factors in determining the series resistance of the chip. The net capacitance of the substrate is sum of the nitric-oxide layer capacitances on both sides of the wafer and that of the nitride membrane. Experimental data compared with theoretical model showed good result without any correction factor. The measured capacitance value is reasonably closer to the calculated value and the higher substrate capacitance value can be reduced by minimising the fluid area in contact with the chip.