DocumentCode
404607
Title
The intersection of controls and physics in atomic force microscopy
Author
Cleveland, J.P.
Author_Institution
Asylum Res., Santa Barbara, CA, USA
Volume
3
fYear
2003
fDate
9-12 Dec. 2003
Firstpage
2124
Abstract
This paper points out some of the areas in atomic force microscopes where control can make big contributions. There are lots of interesting problems to be found, and given that there are several thousand atomic force microscopes in the world, and the market is still growing, it also means that these problems are very relevant. The paper also gives a more a detailed look into one of these problems - an interesting non-linear dynamics problem that appears in the field. While a fair amount of work has been done on this problem, a better understanding of this problem can lead to improved operation of the microscope. Positioning control loops that are most commonly used in atomic force microscopes are piezo-electric actuators, and these are inherently non-linear devices.
Keywords
atomic force microscopy; piezoelectric actuators; position control; atomic force microscopy; piezoelectric actuators; positioning control loops; Atomic force microscopy; Coils; Feedback loop; Force control; Instruments; Magnetic noise; Magnetic sensors; Manufacturing; Physics; Piezoelectric actuators;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 2003. Proceedings. 42nd IEEE Conference on
ISSN
0191-2216
Print_ISBN
0-7803-7924-1
Type
conf
DOI
10.1109/CDC.2003.1272931
Filename
1272931
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