Design, test and qualification of stiction-free MEMS optical switches

Author

Su, Guo-Dung John ; Jiang, Fukang ; Chiu, E. ; Avakian, A. ; Dickson, J. ; Jia, D. ; Tsao, T.

Author_Institution

Umachines Inc., Pasadena, CA, USA

Volume

1

fYear

2003

fDate

15-19 Dec. 2003

Abstract

This paper describes the design, test and qualification of MEMS optical switches developed at Umachines, Inc. The mirror monolithically integrated with MEMS actuator is driven by electromagnetic force and is perpendicular to light path during movement. Low voltage (< 1V) and low current (<10 mA) requirement of the MEMS actuators simplifies the control electronic circuits. Fully packaged 2×2 add/drop switches have passed rigorous Telcordia^™ GR-1221.

Keywords

electric actuators; electromagnetic forces; micromechanical devices; monolithic integrated circuits; optical elements; optical switches; stiction; MEMS actuator; MEMS optical switches; Telcordia^™ GR-1221; Umachines; add/drop switches; control electronic circuits; electromagnetic force; fully packaged; light path; low current; low voltage; monolithically integrated; Actuators; Circuit testing; Electromagnetic forces; Low voltage; Micromechanical devices; Mirrors; Optical design; Optical switches; Qualifications; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on

Print_ISBN

0-7803-7766-4

Type

conf

DOI

10.1109/CLEOPR.2003.1274564

Filename

1274564