DocumentCode
405343
Title
Bi-directional differential actuator with two degree-of-freedom
Author
Hsiao-wen, Lee ; Shih-yi, Wen ; Wu-zheng, Guo
Author_Institution
Opto-Electron. & Syst. Lab., Ind. Technol. Res. Inst., Chutung, Taiwan
Volume
1
fYear
2003
fDate
15-19 Dec. 2003
Abstract
A novel bi-directional differential actuator with in-plane and out-of-plane two degrees of freedom is demonstrated. The design of the actuator utilizes four-suspension-arm differential structure and differential driving. Out-of-plane deflection as high as 10 μm is achieved with 7-V drive.
Keywords
microactuators; optical design techniques; bidirectional differential actuator; degree-of-freedom; differential driving; four-suspension-arm differential structure; in-plane; out-of-plane; Actuators; Bidirectional control;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN
0-7803-7766-4
Type
conf
DOI
10.1109/CLEOPR.2003.1274569
Filename
1274569
Link To Document