DocumentCode :
405377
Title :
Low voltage and pull-in state adjustable dual-servo-scanning-mirror
Author :
Wang, Kenvin ; Sinclair, Mike ; Böhringer, Karl F.
Author_Institution :
Washington Univ., Seattle, WA, USA
Volume :
1
fYear :
2003
fDate :
15-19 Dec. 2003
Abstract :
This paper reports a new dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the tilting-angle of the mirror.
Keywords :
electrostatic actuators; micromirrors; optical tuning; servomechanisms; thermo-optical effects; electrostatic actuator tuning loading; electrostatic driving principles; low voltage dual-servo-scanning-mirror tilting-angle; pull-in state adjustable dual-servo-scanning-mirror; thermal actuator tuning loading; Displays; Electrostatic actuators; Low voltage; Micromechanical devices; Micromirrors; Mirrors; Optical films; Sensor arrays; Springs; Thermal force;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
Type :
conf
DOI :
10.1109/CLEOPR.2003.1274606
Filename :
1274606
Link To Document :
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