Title :
Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength
Author :
Amano, T. ; Koyama, F. ; Arai, M. ; Mastutani, A.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We present the design and the fabrication of novel micromachined vertical-cavity light emitters/lasers with a thermal strain control layer for temperature insensitive operations. The temperature dependence of a resonant wavelength can be freely controlled in a micromachined cantilever structure. We demonstrated a micromachined resonant cavity light emitter with a low temperature dependence of an emission wavelength. The temperature dependence was as small as +0.015 nm/K.
Keywords :
micromachining; optical communication equipment; optical design techniques; optical fabrication; strain control; surface emitting lasers; thermo-optical effects; emission wavelength; micromachined cantilever structure; micromachined resonant cavity light emitter design; micromachined vertical-cavity light lasers fabrication; resonant wavelength; temperature insensitive operations; thermal strain control layer; Distributed Bragg reflectors; Gallium arsenide; Laser tuning; Light emitting diodes; Resonance; Strain control; Surface emitting lasers; Temperature dependence; Thermal expansion; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1274623
