Title :
Non-axial-scanning confocal microscope by membrane mirror shape switching
Author :
Yasuno, Yoshiaki ; Wiesendanger, Tobias F. ; Ruprecht, Aiko K. ; Makita, Satoshi ; Yatagai, Toyohiko ; Tiziani, Hans J.
Author_Institution :
Inst. of Appl. Phys., Tsukuba Univ., Ibaraki, Japan
Abstract :
A non-axial-scanning confocal microscope by membrane mirror shape switching has been developed. The system controls the defocus of an objective by membrane mirror, and determines the height of an object from the confocal output value of each defocus.
Keywords :
adaptive optics; height measurement; membranes; mirrors; optical focusing; optical microscopes; confocal output value; defocus; membrane mirror; membrane mirror shape switching; nonaxial-scanning confocal microscope; object height; Adaptive control; Biomembranes; Charge coupled devices; Light sources; Microscopy; Mirrors; Programmable control; Shape control; Shape measurement; Time measurement;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
Print_ISBN :
0-7803-7766-4
DOI :
10.1109/CLEOPR.2003.1277006
