• DocumentCode
    405660
  • Title

    Interferometric differential phase ellipsometer

  • Author

    Chou, Chien ; Ten, Hui-Kang

  • Author_Institution
    Inst. of Radiol. Sci., Nat. Yang-Ming Univ., Taipei, Taiwan
  • Volume
    2
  • fYear
    2003
  • fDate
    15-19 Dec. 2003
  • Abstract
    We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.
  • Keywords
    ellipsometers; heterodyne detection; light interferometers; phase detectors; common-path optical heterodyne interferometer; differential phase detection; differential phase ellipsometer; ellipsometric parameters; interferometric ellipsometer; near real time measurements; Decoding; Ellipsometry; Instruments; Optical films; Optical interferometry; Optical mixing; Optical polarization; Optical refraction; Phase detection; Phase measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on
  • Print_ISBN
    0-7803-7766-4
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2003.1277012
  • Filename
    1277012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=405660