Periodic nanostructure formed on TiN and DLC by femtosecond laser pulses

Author

Yasumaru, N. ; Miyazaki, K. ; Kiuchi, J.

Author_Institution

Fukui Nat. Coll. of Technol., Japan

Volume

2

fYear

2003

fDate

15-19 Dec. 2003

Abstract

Hard coatings of TiN and DLC were irradiated by 800- and 267-nm, femtosecond (fs) laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly-polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly-polarized light forms fine dot structures. The size of these surface structures is 1/10-1/5 of the laser wavelength and decreases with a decrease in the laser wavelength.

Keywords

diamond-like carbon; high-speed optical techniques; laser ablation; light polarisation; particle size; periodic structures; plasma deposited coatings; surface morphology; titanium compounds; 267 nm; 800 nm; C; DLC; TiN; ablated thin-film surfaces; circularly-polarized light; energy fluence; femtosecond laser pulses; hard coatings; laser pulse irradiation; laser wavelength; linearly polarized pulses; periodic nanostructure; surface structures size; Coatings; Laser ablation; Optical arrays; Optical polarization; Optical pulses; Periodic structures; Surface emitting lasers; Surface structures; Tin; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on

Print_ISBN

0-7803-7766-4

Type

conf

DOI

10.1109/CLEOPR.2003.1277208

Filename

1277208