Diaphragm-Based Fiber Optic Fabry–Perot Accelerometer With High Consistency

Consistency is one of the most important parameters influenced on the practicability of sensors. A fiber optic Fabry-Perot accelerometer (FPA) with a diaphragm-mass-collimator (DMC) integrated structure to achieve high consistency is presented. This design makes the structure more compacts and the manufacturing process more controllable. Theoretical analysis is used to evaluate the performance of sensitivity, resonant frequency, resolution, and dynamic range. Four DMC fiber optic FPAs were manufactured, and experiments on several technical indicators were carried out. The experimental results are close to the calculated values and show that the maximum sensitivity difference of the DMC-FPAs is less than 0.38 dB (re: 0 dB = 1 V/g) in a frequency band of 10-125 Hz, and the maximum sensitivity fluctuation is less ±0.36 dB. The results verify the improvements on consistency, and the reasons for the good performances are discussed.