Characterization of ferroelectric capacitors over wide frequency range

Author

Supriyanto, Eko ; Goebel, Holger

Author_Institution

Inst. of Electron., Univ. of Fed. Armed Forces Hamburg, Humburg, Germany

fYear

2003

fDate

9-11 Dec. 2003

Firstpage

283

Lastpage

286

Abstract

In this paper the transient response measurement method is presented which allows the characterization of ferroelectric capacitors for signal slew rates up to 800 MV/s. This method completes the Quasi Static Capacitance Voltage (QSCV) measurement and the Sawyer Tower measurement which is suitable for low and medium frequencies. The comparison of the results obtained by different measurement methods show the usability of the presented method.

Keywords

bismuth compounds; capacitance; coercive force; dielectric hysteresis; dielectric polarisation; dielectric relaxation; ferroelectric capacitors; ferroelectric materials; ferroelectric thin films; permittivity; strontium compounds; thin film capacitors; transient response; Sawyer Tower measurement; SrBi₂Ta₂O₉; quasistatic capacitance voltage measurement; signal slew rates; transient response measurement method; wide frequency range ferroelectric capacitors; Capacitance measurement; Capacitance-voltage characteristics; Capacitors; Dielectric measurements; Ferroelectric materials; Frequency measurement; Hysteresis; Polarization; Transient response; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on

Print_ISBN

977-05-2010-1

Type

conf

DOI

10.1109/ICM.2003.1287805

Filename

1287805